| 摘要 |
PROBLEM TO BE SOLVED: To provide a simply constituted substrate transport apparatus capable of shortening a lead time for transporting substrates. SOLUTION: A substrate transport apparatus 12 includes a movable arm assembly 18, dual substrate holders 22, 23 and a coaxial drive shaft assembly. The movable arm assembly 18 includes an approximately X-shaped shaft assembly. The dual substrate holders 22, 23 are connected to different pairs of arms 30, 31, 32 and 33 of an X-shaped member. The coaxial drive shaft assembly simultaneously moves the X-substrate holders 22, 23 in a reverse motion between extended and retracted positions. COPYRIGHT: (C)2008,JPO&INPIT |
