| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a large area stamper capable of manufacturing the large area stamper over many stages by a simple process. SOLUTION: The manufacturing method of the large area stamper 20 includes a stage (a) for laminating a first mask 23a having a first pattern 26a formed thereto on a positive photoresist layer 21, a stage (b) for exposing the upper surface of the first mask 23a, a stage (c) for developing the positive photoresist layer 21 to form recessed parts 27, a stage (d) for performing molding so as to form the protruded parts 28 corresponding to the recessed parts 27, and a stage (e) for removing the positive photoresist layer 21. COPYRIGHT: (C)2008,JPO&INPIT
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