| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate-mounting mechanism capable of effectively restraining a deformation of the substrate to be processed by surely supporting the substrate to be processed by an up-and-down pin, even if the substrate to be processed is large sized. <P>SOLUTION: The substrate mounting mechanism comprises a susceptor 4 as a mounting stage for mounting a substrate G having flexibility; lifter pins 8a, 8b provided in a protruding-receding-free manner on the mounting surface of the susceptor 4, and raising and falling the substrate G in between a transferring position over the susceptor 4 with the substrate G being supported by its periphery part and central part to be transferred and the mounting position on the susceptor 4; and driving parts 9a, 9b as the driving mechanism for driving the lifter pins 8a, 8b. The driving parts 9a, 9b makes the lifter pin 8a protrude higher than the lifter pin 8b, when raising and falling the substrate G so that the substrate G is supported stably by the lifter pins 8a, 8b with the substrate G bent protruding downwardly. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
