DRAWING METHOD, DRAWING APPARATUS, AND INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To precisely draw a pattern on a drawing surface of an object in a short time. SOLUTION: An electron beam converged to an area MA of a substrate W rotating at a speed to be exposed by the electron beam is deflected periodically to a +X direction without blanking by applying a pulse voltage PV to a second deflection electrode 18. Thus, a beam spot SP of the electron beam can be periodically positioned on any track Trmdefined by the area MA, and the electron beam always contributes to the drawing of a mark Mmnon either one of tracks Trm. COPYRIGHT: (C)2008,JPO&INPIT