| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment device which forms a synthetic resin membrane on a base body by evaporating≥2 species raw material monomers and introducing the monomers in a vacuum treatment chamber, and to improve membrane forming velocity and use efficiency of monomers and reduce electric power for evacuation. SOLUTION: The vacuum treatment device forms the synthetic resin membrane by evaporating at least two species of raw material monomers, introducing the monomers in the vacuum treatment chamber and polymerizing the monomers on the base body. The device carries out autonomous membrane formation without depending on an evacuation device by using the at least two species raw material monomers which can react in polyaddition and carrying out (A) a process for evacuating the vacuum chamber, (B) a process for introducing the monomers by opening raw material valves and (C) a process for stopping the evacuation and closing the evacuation valve. COPYRIGHT: (C)2008,JPO&INPIT
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