| 摘要 |
<p>Disclosed is a method for making surface antibacterial products utilizing physical vapor deposition technology, the method involves using physical vapor deposition technology to coat antibacterial target materials or vaporization materials onto a substrate surface to form an antibacterial film layer, wherein the antibacterial target materials or vaporization materials are one or more selected form the group consisting of Ti, Zn, Ca, Si, Mg, Zr, Cd, As, Sb, Se, Ce, Re, Cu, Ag, Pb, Hg, Co, Ni, Al, Fe, and oxides, sulfides, nitrides, and carbides thereof, a reaction gas usedd in the physical vapor deposition technology is O<SUB>2</SUB>, N<SUB>2</SUB>, NH<SUB>3</SUB>, CH<SUB>4</SUB>, C<SUB>2</SUB>H<SUB>6</SUB> or H<SUB>2</SUB>S. Holes (1) are drilled on the target (3) surface to feed a gas through gas passages (2), thereby preventing the target from poisoning efficiently to realize multi-arc coating and magnetron sputtering and improving coating efficiency and film layer quality.</p> |
