| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique of improving production capacity by using no photolithography process and by simplifying processes, in the manufacturing processes of TFTs, an electronic circuit using TFTs, and a display apparatus formed by TFTs. <P>SOLUTION: A laser beam irradiation apparatus is disclosed which includes a laser oscillator for emitting a laser beam, an optical system for forming the laser beam into a linear beam on the surface of a workpiece, and a mask installed between the optical system and the workpiece. The linear beam is divided into a plurality of laser beams through the mask, with the workpiece irradiated by the plurality of laser beams. <P>COPYRIGHT: (C)2008,JPO&INPIT |
