| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure the position of a reference mark on a drawing object such as a substrate in a short time. <P>SOLUTION: A drawing device for drawing a circuit pattern is equipped with a camera movable in a Y direction (main scanning direction) and a drawing table mounting a substrate movable in a X direction (sub scanning direction). A substrate scale 16 is disposed along the Y direction and fixed to the base. A light source unit 13 that selectively radiates red light L1 and green light L2 is attached to the camera 11, and a dichroic mirror 15 is disposed below the camera 11. The red light L1 directly reaches the substrate SW to detect the position of an alignment hole, while the green light L2 is reflected and guided to the reference scale 16 to detect the stage position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
