| 摘要 |
PROBLEM TO BE SOLVED: To provide quartz glass used for semiconductor manufacture and having excellent corrosion resistance to plasma, a quartz glass tool, a method of manufacturing the quartz glass, mixed quartz powder suitably used for the manufacture of the quartz glass and a method of manufacturing the mixed quartz powder. SOLUTION: The quartz glass contains 0.1 to 20 mass% in total of two or more of dope elements. The dope element contains one or more of first elements selected from the group composed of N, C and F and one or more of second elements selected from the group composed of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids. COPYRIGHT: (C)2008,JPO&INPIT
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