RESISTANCE VALUE MEASURING METHOD FOR ELECTRONIC COMPONENT AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a resistance value measuring method and its device for performing resistance value measurement for an electronic component of a small resistance value with high accuracy and the measurement work in a short period of time, as to a device for measuring the resistance value of an electronic component and inspecting it. SOLUTION: The resistance value measuring device comprises: a workpiece holding part 102 holding a plurality of arranged measuring objects 101; contact point parts 103 providing electrical conduction with low contact resistance equal to or less than 5mΩin contact with electrodes of the measuring objects at the holding part 102; a switching part 104 for electrically together connecting the point parts 103 with low contact resistance equal to or less than 5mΩor separating them from each other; a measuring instrument 105 connected to the point parts 103 for measuring resistance values; and a calculation control part 106 for executing calculation while performing automatic switching. COPYRIGHT: (C)2008,JPO&INPIT