| 摘要 |
PROBLEM TO BE SOLVED: To provide a low pressure leakage testing method capable of preventing wrong recognition of gas leakage from a test body, and acquiring a detection result to which nobody have any objection. SOLUTION: A test piece 1 having a through-hole 2 having the inner diameter of 10μm is mounted on the test body 100, and a detection agent 5 is stuck on its surface, and furthermore its surface side is covered with a metal sheet 4. Gas body for the test is allowed to flow in a low pressure, and a time until start of gas leakage from the through hole 2 having the size of 1-10μm is determined, and the test of the test body 100 is performed under the condition of the gas body (a), the low pressure (b) and the time (c). If gas leakage does not occur under the condition of a, b and c, it is determined that the test body 100 has no gas leakage. COPYRIGHT: (C)2008,JPO&INPIT
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