发明名称 VACUUM ISOLATION VALVE FOR LIQUID CRYSTAL DISPLAY PANEL MANUFACTURING DEVICE
摘要 <p>A vacuum isolation valve for a liquid crystal display panel manufacturing device is disclosed. The vacuum isolation valve can minimize a pressure variation and increase a sealing effect by comprising an interrupting body having a triangle- shaped cross section so as to offset positive pressure and back pressure when the interrupting body ascends to close the valve.</p>
申请公布号 WO2008029966(A1) 申请公布日期 2008.03.13
申请号 WO2006KR03733 申请日期 2006.09.20
申请人 PARK, YOUNGNAM;KO, DAEWOON 发明人 PARK, YOUNGNAM;KO, DAEWOON
分类号 H01L21/02 主分类号 H01L21/02
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