发明名称 SOFT MEMS
摘要 A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the su bstrate. The at least one active region is patterned from a second polymer m aterial that is modified to perform at least one function within the at leas t one active region.
申请公布号 CA2653557(A1) 申请公布日期 2008.03.13
申请号 CA20072653557 申请日期 2007.06.01
申请人 THE TRUSTEES OF THE UNIVERSITY OF ILLINOIS 发明人 LIU, CHANG;ENGEL, JONATHAN;CHEN, NANNAN;RYU, KEE;LIU, CHANG;YANG, YINGCHEN;TUCKER, CRAIG
分类号 B32B7/02;B81C99/00 主分类号 B32B7/02
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