| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for preventing a dry core that becomes a starting point, when a dry region is formed on a substrate from being generated at least at two locations near the center of the substrate, when discharging cleaning liquid to the surface of the substrate from a discharge nozzle and performing scanning with the discharge nozzle for spin-drying the substrate. SOLUTION: When the substrate W is rotated about the longitudinal axis with a rotary motor by holding the substrate in a horizontal attitude with a spin chuck, the cleaning liquid is discharged from the discharge port of the pure-water discharge nozzle 20 to the surface of the substrate; and the discharge port of the pure-water discharge nozzle is scanned from a position that faces the center of the substrate, to a position that faces the periphery of the substrate, gas is sprayed from the jet of a gas jet nozzle 34 to the surface at the center of the substrate, before the second dry core is generated after a first dry core that becomes a starting point, when a dry region is formed on the substrate is generated near the center of the substrate, immediately after the start of moving the pure-water discharge nozzle. COPYRIGHT: (C)2008,JPO&INPIT
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