| 摘要 |
PROBLEM TO BE SOLVED: To restrain a displacement between a substrate and a mask generated at a time of sticking the substrate and the mask by magnetic force. SOLUTION: In a process evaporating an organic compound layer (an organic EL element film) structuring the organic light-emitting display device on a substrate 2 through a mask 3, after positioning the substrate 2 and the mask 3, the substrate 2 is pressed and temporarily fixed on the mask 3 by a plurality of pressure members 5. As the displacement between the substrate 2 and the mask 3 is restrained by the temporary fixing, the substrate 2 is stuck on the mask 3 by a magnet 6. By temporarily fixing a plurality of positions of the substrate 2 by the plurality of pressure members 5, respectively, after alignment, a patterning with high precision can be achieved, and displacement of the organic EL element film to an anode can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
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