发明名称 Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure
摘要 A dielectric barrier discharge uses three electrodes at an atmospheric pressure. A wide discharge gap can be used and an enhanced plasma density can be achieved so that thick materials can be processed and its processing speed can also be greatly improved.
申请公布号 US2008060579(A1) 申请公布日期 2008.03.13
申请号 US20060510824 申请日期 2006.08.28
申请人 ATOMIC ENERGY COUNCIL-INSTITUE OF NUCLEAR ENERGY RESEARCH 发明人 HSIEH CHENG-CHANG;WU MIEN-WIN;AI CHI-FONG
分类号 C23C16/00 主分类号 C23C16/00
代理机构 代理人
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