发明名称 |
Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure |
摘要 |
A dielectric barrier discharge uses three electrodes at an atmospheric pressure. A wide discharge gap can be used and an enhanced plasma density can be achieved so that thick materials can be processed and its processing speed can also be greatly improved.
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申请公布号 |
US2008060579(A1) |
申请公布日期 |
2008.03.13 |
申请号 |
US20060510824 |
申请日期 |
2006.08.28 |
申请人 |
ATOMIC ENERGY COUNCIL-INSTITUE OF NUCLEAR ENERGY RESEARCH |
发明人 |
HSIEH CHENG-CHANG;WU MIEN-WIN;AI CHI-FONG |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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