发明名称 DEVICE AND METHOD TO STABILIZE BEAM SHAPE AND SYMMETRY FOR HIGH ENERGY PULSED LASER APPLICATIONS
摘要 A beam mixer for increasing intensity symmetry along a selected axis of a beam (wherein the beam extends from a first edge to a second edge along the axis) is disclosed and may include a plurality of mirrors establishing a spatially inverting path. For the beam mixer, the inverting path may have a beginning and an end and may be characterized in that a part of the beam near the first beam edge at the beginning of the path translates to the second beam edge at the end of the path. For this aspect, the beam mixer may further include an optic dividing the beam into first and second beam portions, the optic placing the first portion onto the inverting path and recombining the first and second portions onto a common path after the first portion has traveled along the inverting path thereby mixing the beam.
申请公布号 WO2007145791(A3) 申请公布日期 2008.03.13
申请号 WO2007US12389 申请日期 2007.05.22
申请人 CYMER, INC.;HOFMANN, THOMAS 发明人 HOFMANN, THOMAS
分类号 H01S3/08 主分类号 H01S3/08
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