TEMPERATURE MEASURING DEVICE

摘要

A temperature measuring device (5) is provided with a sheathed thermocouple (50). The sheathed thermocouple has a leading end section (50a) movable in an advancing/retracing direction by following a susceptor (4), and a buffer section (50b) extending to the outside of a chamber (1) to allow movement of the leading end section (50a). The temperature measuring device is also provided with a compression coil spring (53) for urging the leading end section (50a) in a direction to press the leading end section to the susceptor (4). A hermetically sealing member (51) storing the compression coil spring (53) and the buffer section (50b) is adhered to the bottom wall (19) of the chamber (1) so that inside the hermetically sealed member communicates with the inside of the chamber (1). The end portion of the buffer section (50b) extends to the external of the hermetically sealed member (51), and a connecting section (55) is formed by being welded to a part where the end portion of the buffer section (50b) of the hermetically sealed member (51) extends.