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发明名称
PLASMA PRODUCING METHOD AND APPARATUS AS WELL AS PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR100812746(B1)
申请公布日期
2008.03.12
申请号
KR20060104508
申请日期
2006.10.26
申请人
发明人
分类号
H01L21/3065;H01L21/203;H01L21/205
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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