| 摘要 |
<p>An interlock device for preventing damage of a wafer is provided to prevent a cassette from being unloaded in an SMIF unit before wafer loading/unloading operation of a handler arm is completed. An interlock device includes an SMIF(Standard Mechanical Interface) unit for loading and unloading a wafer cassette in and from process equipment, and a handler arm(23) for transferring a wafer from the wafer cassette to a stage. A detection sensor(40) is installed on a lower portion of the handler arm to detect loading/unloading operation of the handler arm. A relay opens or closes a circuit to operate an unload switch(43) if a signal indicative of operation completion of the handler arm is input from the detection sensor.</p> |
