MULTIPLE FLUID SUPPLYING APPARATUS FOR CARRIER OF SEMICONDUCTOR WAFER POLISHING SYSTEM,申请号EP20050765992-传众专利搜索

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发明名称	MULTIPLE FLUID SUPPLYING APPARATUS FOR CARRIER OF SEMICONDUCTOR WAFER POLISHING SYSTEM
摘要
申请公布号	EP1897126(A1)	申请公布日期	2008.03.12
申请号	EP20050765992	申请日期	2005.06.28
申请人	DOOSAN MECATEC CO., LTD.	发明人	SEO, SUNG-BUM
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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