发明名称 DISPLACEMENT DETECTING METHOD, DISPLACEMENT DETECTING DEVICE AND CALIBRATING METHOD THEREOF, AND RECORDING DEVICE OF INFORMATION RECORDING MEDIUM ORIGINAL DISK
摘要 Two light beams are incident on the same position on a surface of an object (105) to be measured obliquely from upper sides facing each other, and positions at which the reflecting light beams are incident on respective predetermined detection surfaces are detected by position detectors (102 and 104) for outputting respectively as position detection signals. The displacement of the surface to be measured is detected by obtaining the difference between or the sum of respective position detection signals so as to cancel the components in the directions opposite to each other out of the components indicating changes from the reference position included in respective position detection signals. <IMAGE>
申请公布号 EP1424537(A4) 申请公布日期 2008.03.12
申请号 EP20020758792 申请日期 2002.08.07
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD 发明人 ABE, SHINYA
分类号 G01B11/00;G01B11/02;G01B11/06;G01B11/24;G01D5/30;G03F7/20;G03F9/00;G11B7/00;G11B7/004;G11B7/26;G11B9/10;H01J37/304;H01L21/027 主分类号 G01B11/00
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