DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPE HAVING ENHANCED SPEED AND AREA OF INSPECTION

摘要

A differential interference contrast microscope having enhanced inspection speed and an inspection area is provided to reduce the inspection time by controlling the movement of the microscope toward a vertical axis according to initial and final relative displacement values by a laser displacement sensor. A differential interference contrast microscope(100) having an enhanced inspection speed and an enhanced inspection area is composed of an objective lens(110) positioned at one end of a barrel(120); a dual-refractive prism(130) disposed in the barrel adjacently to the objective lens; a lighting(140) installed at the outer side of the barrel under the dual-refractive prism; a half-mirror(150) installed in the barrel at the spot where axes of the barrel and the lighting cross each other; an analyzer(160) arranged in the barrel under the half-mirror; a polarizing filter(170) installed at the outer side of the barrel between the half-mirror and the lighting; a laser displacement sensor(180) positioned at the outer side of the barrel on the opposite side of the lighting to control the vertical movement of the microscope toward an object according to initial and final relative displacement values; and an inspection camera(190) positioned on the other end of the barrel.