发明名称 Method of manufacturing thin film transistor, thin film transistor manufactured using the method, and flat panel display device comprising the thin film transistor
摘要 Provided are a method of manufacturing an organic thin film transistor (TFT), the organic TFT manufactured using the method, and a flat panel display device comprising the organic TFT. The method includes: coating a lubricant on a predetermined region of a substrate where an organic semiconductor layer is not to be formed; coating an organic semiconductor layer on the entire substrate; heating the coated substrate to melt the lubricant; and releasing the organic semiconductor layer formed above the predetermined region from the substrate. According to the method, the organic semiconductor layer can be effectively patterned without damaging the substrate and the organic semiconductor material.
申请公布号 US7341961(B2) 申请公布日期 2008.03.11
申请号 US20050280480 申请日期 2005.11.15
申请人 发明人
分类号 H01L21/31 主分类号 H01L21/31
代理机构 代理人
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