发明名称 METHOD FOR VAPOR-DEPOSITING STRIP-SHAPED SUBSTRATES WITH A TRANSPARENT BARRIER LAYER MADE OF ALUMINUM OXIDE.
摘要 The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxide, a partially enclosed layer made of a metal or of a metal oxide is applied to the substrate by magnetron sputtering.
申请公布号 MXPA05005113(A) 申请公布日期 2008.03.11
申请号 MX2005PA05113 申请日期 2003.10.16
申请人 ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 NICOLAS SCHILLER;STEFFEN STRAACH;MATHIAS RABISCH;CHRISTOPH CHARTON;MATTHIAS FAHLAND
分类号 C23C14/00;C23C14/02;C23C14/08;C23C14/35;C23C28/00 主分类号 C23C14/00
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