发明名称 |
METHOD FOR VAPOR-DEPOSITING STRIP-SHAPED SUBSTRATES WITH A TRANSPARENT BARRIER LAYER MADE OF ALUMINUM OXIDE. |
摘要 |
The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxide, a partially enclosed layer made of a metal or of a metal oxide is applied to the substrate by magnetron sputtering.
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申请公布号 |
MXPA05005113(A) |
申请公布日期 |
2008.03.11 |
申请号 |
MX2005PA05113 |
申请日期 |
2003.10.16 |
申请人 |
ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
NICOLAS SCHILLER;STEFFEN STRAACH;MATHIAS RABISCH;CHRISTOPH CHARTON;MATTHIAS FAHLAND |
分类号 |
C23C14/00;C23C14/02;C23C14/08;C23C14/35;C23C28/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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