发明名称 Calibration method in a chip mounting device
摘要 A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head ( 2 ) and a second recognition mark ( 13 ) put on a stage ( 26 ) with two-field recognition means ( 7 ) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means ( 7 ); and, with the head ( 2 ) lowered to position the first recognition mark closely to the second recognition mark ( 13 ), recognizing both marks with third recognition means ( 20 ) when the two-field recognition means ( 7 ) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means ( 7 ).
申请公布号 US7341877(B2) 申请公布日期 2008.03.11
申请号 US20040016720 申请日期 2004.12.21
申请人 TORAY ENGINEERING CO., LTD. 发明人 YAMAUCHI AKIRA;ARAI YOSHIYUKI
分类号 H01L21/66;H01L21/00;H01L23/544;H05K13/00;H05K13/08 主分类号 H01L21/66
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