发明名称 |
Calibration method in a chip mounting device |
摘要 |
A method of accurately calibrating a movement control system of mark recognition means in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head ( 2 ) and a second recognition mark ( 13 ) put on a stage ( 26 ) with two-field recognition means ( 7 ) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means ( 7 ); and, with the head ( 2 ) lowered to position the first recognition mark closely to the second recognition mark ( 13 ), recognizing both marks with third recognition means ( 20 ) when the two-field recognition means ( 7 ) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means ( 7 ).
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申请公布号 |
US7341877(B2) |
申请公布日期 |
2008.03.11 |
申请号 |
US20040016720 |
申请日期 |
2004.12.21 |
申请人 |
TORAY ENGINEERING CO., LTD. |
发明人 |
YAMAUCHI AKIRA;ARAI YOSHIYUKI |
分类号 |
H01L21/66;H01L21/00;H01L23/544;H05K13/00;H05K13/08 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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