| 摘要 |
A substrate conveying apparatus and a substrate conveying method using the apparatus are provided to block particles from adhering to a substrate when the substrate is conveyed to thereby prevent the production of poor products and equipment contamination. A substrate conveying apparatus(100) includes a main frame(110), a substrate conveying unit(120), a substrate(130), a vent(150) and an air blow(140). The substrate conveying unit is located in the main frame. The substrate is located on the substrate conveying unit, and the vent is placed at the bottom of the main frame. The air blow is located at the upper part of the main frame. |
