| 摘要 |
A method for fabricating an organic electroluminescence display is provided to prevent a damage of a sputtering target caused by an arc discharge by reducing the number of deposition particles. A method for fabricating an organic electroluminescence display includes the steps of: forming a first electrode(180) on a substrate using a sputtering device having a power density between 0 to 1.4W/cm^2; forming an organic layer(191) having at least a light emitting layer on the first electrode; and forming a second electrode(192) on the organic layer. The power density is between 0 to 0.7W/cm^2. The first electrode is a stacked structure having a reflective layer and a transparent electrode layer. The reflective layer is composed of a Ag-alloyed layer. The transparent electrode layer is composed of ITO(Indium Tin Oxide) or IZO(Indium Zinc Oxide). |
