| 摘要 |
This invention provides a mass analyzer that is mounted on the wall part of a chamber for analyzing an analyte gas present in the chamber. The mass analyzer comprises a measuring part, which, when the mass analyzer is mounted in the chamber, is inserted into the chamber for measuring the partial pressure for each mass charge ratio of the gas component in the analyte gas, an operating part, which, when the mass analyzer is mounted in the chamber, is located on the outer side of the wall part for operating the measuring part, and a display part which, when the mass analyzer is mounted in the chamber, is located on the outer side of the wall part for displaying the measurement results of the measuring part. The mass analyzer is characterized in that the measuring part, the operating part, and the display part are located closely to each other. ® KIPO & WIPO 2008
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