| 摘要 |
A micro-vibrating device is provided to adjust a natural frequency of a vibrator by electrically controlling a twist spring constant of a beam coupler. A micro-vibrating device includes a vibrator(110), a frame(120), and a coupler(130). The coupler couples the vibrator with the frame and defines a vibration axis for a vibrating movement of the vibrator with respect to the frame. The vibrator includes a main vibrating unit and a spindle unit, which is attached to the main vibrating unit. The spindle unit is moved in a direction crossing the vibration axis. The vibrator includes support base units(113A,113B) and support beams(114A,114B). The support base units are fixed on the main vibrating units. The support beams couple the support base unit with the spindle unit.
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