SYSTEME MICRO-ELECTROMECANIQUE COMPRENANT UNE PARTIE DEFORMABLE ET UN DETECTEUR DE CONTRAINTE

摘要

The system has a stress detector (10) connected to a beam (1) and comprising a base portion (2) and shunt portion (3). The portions are juxtaposed such that the portion (2) is in electrical contact with the portion (3), where materials of the portions are selected such that contact resistance between the portions varies based on system`s deformation. The portion (3) has electrical conductivity greater than that of the portion (2). Electrical connections (4a-4d) are arranged such that the modification of distribution of current in the portions is detected from the connections. An independent claim is also included for a method of forming a micro-electromechanical system from a substrate.