| 摘要 |
<p>A method for preparing a polymer compound is provided to produce the polymer compound having higher sensitivity than the conventional polymer compound, and improved pattern collapse. A method for preparing a polymer compound includes a step of polymerizing a polymerizable compound having ethylenic double bonds using a polymerization initiator and a chain transfer agent represented by the following formula (1). A molar ratio(I/S) of the polymerization initiator(I) to the chain transfer agent(S) represented by the formula (1) added is 1.0 or less. In the formula (1), L represents a single bond or m+1-functional hydrocarbon group, each of R1 and R2 represents a bifunctional linker selected from the group consisting of an alkylene group, a cycloalkylene group, an oxyalkylene group, an arylene group, a bifunctional thiazoline ring, a bifunctional oxazoline ring, and a bifunctional imidazoline ring, or a bifunctional linker in which at least two thereof are linked with each other, each of R3 and R4 represents an alkyl group, a cycloalkyl group, an alkenyl group, or an aryl group, n represents 0 or 1, plural (n)s are identical to or different from one another, k represents 0 or 1, m represents an integer of 1-10, and R3 and R4 form a ring structure together with neighboring R1 or L.</p> |
