发明名称 |
SPACE TRANSFORMER MANUFACTURING METHOD |
摘要 |
A method for manufacturing a space transformer is provided to reduce complexity of a space transformer manufacturing process by manufacturing a via hole on a semi-sintered ceramic sheet and then performing a patterning process and a sintering process. A drilling process is performed on a semi-sintered ceramic sheet(21) to formed a via hole(22). The ceramic sheet, on which the via hole is formed, is sintered. A conductive metal is patterned on the sintered ceramic sheet to form a circuit pattern(23) on an upper surface and a lower surface of the patterned ceramic sheet, and a via in which the conductive metal is gap-filled. After the ceramic sheet is sintered, the upper surface and the lower surface thereof are polished. The ceramic sheet is one selected from SiC and AlN.
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申请公布号 |
KR100811466(B1) |
申请公布日期 |
2008.03.07 |
申请号 |
KR20070024846 |
申请日期 |
2007.03.14 |
申请人 |
TSE CO., LTD. |
发明人 |
HAN, JAE JEONG;CHU, GYO CHOL;MAENG, BO RA;SEO, BYUNG JUN |
分类号 |
H01L21/66;G01R1/073;H05K3/42 |
主分类号 |
H01L21/66 |
代理机构 |
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