发明名称 SPACE TRANSFORMER MANUFACTURING METHOD
摘要 A method for manufacturing a space transformer is provided to reduce complexity of a space transformer manufacturing process by manufacturing a via hole on a semi-sintered ceramic sheet and then performing a patterning process and a sintering process. A drilling process is performed on a semi-sintered ceramic sheet(21) to formed a via hole(22). The ceramic sheet, on which the via hole is formed, is sintered. A conductive metal is patterned on the sintered ceramic sheet to form a circuit pattern(23) on an upper surface and a lower surface of the patterned ceramic sheet, and a via in which the conductive metal is gap-filled. After the ceramic sheet is sintered, the upper surface and the lower surface thereof are polished. The ceramic sheet is one selected from SiC and AlN.
申请公布号 KR100811466(B1) 申请公布日期 2008.03.07
申请号 KR20070024846 申请日期 2007.03.14
申请人 TSE CO., LTD. 发明人 HAN, JAE JEONG;CHU, GYO CHOL;MAENG, BO RA;SEO, BYUNG JUN
分类号 H01L21/66;G01R1/073;H05K3/42 主分类号 H01L21/66
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