| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming method with the use of an aerosol deposition method, which easily removes an agglomerated coarse ceramic powder, easily increases a ratio of produced primary particles, and speedily and efficiently forms a film having superior hardness, and to provide a film-forming apparatus therefor. SOLUTION: The film-forming apparatus 1 comprises: an aerosol-producing device 11 which disperses ceramic particulates of a raw material in a gas to produce an aerosol; a collecting chamber 3; a vacuum chamber 5; and an aerosol-jetting nozzle 12 arranged in the vacuum chamber 5. The collecting chamber 3 is installed in between the aerosol-producing device 11 and the jetting nozzle 12, and collects the coarse ceramic particles in the aerosol supplied from the aerosol-producing device 11 by sedimenting them in the bottom of the collecting chamber 3 so that ceramic particulates in the aerosol to be supplied to the jetting nozzle 12 can have an average diameter of 0.1μm to 2μm. COPYRIGHT: (C)2008,JPO&INPIT
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