CLEANING METHOD USING HYDROCARBON-BASED CLEANING AGENT

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method using a combustible cleaning agent, in which the object to be cleaned can be cleaned efficiently and safely while distilling the used cleaning agent, recovering the distilled cleaning agent and repeatedly using the recovered cleaning agent without charging the cleaning agent, the chargeable object to be cleaned and a charcheable cleaning tool. SOLUTION: The object to be cleaned is cleaned at 50-130°C by using the hydrocarbon-based cleaning agent, which is composed of two or more components selected from 10-12C hydrocarbons and glycol ethers and has the volume resistivity of 1×108to 1×1013Ω-cm and an excellent antistatic property, and keeping the pressure in a cleaning tank below 200 mmHg. COPYRIGHT: (C)2008,JPO&INPIT