发明名称 Semiconductor device having polycide wiring layer, and manufacturing method of the same
摘要 A semiconductor device is provided with a semiconductor substrate comprising element isolation regions and an element region surrounded by the element isolation regions, a first polysilicon layer formed in the element region of the semiconductor substrate, an element-isolating insulation film formed in the element isolation region of the semiconductor substrate, a second polysilicon layer formed on the element-isolating insulation film, a first silicide layer formed on the first polysilicon layer. And the device further comprising a second silicide layer formed on the second polysilicon layer and being thicker than the first silicide layer.
申请公布号 US2008057642(A1) 申请公布日期 2008.03.06
申请号 US20070976515 申请日期 2007.10.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUDA SATOSHI
分类号 H01L21/8242 主分类号 H01L21/8242
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