| 摘要 |
<p>A leak current and an electrostatic breakdown generated at a dielectric film step portion due to surface roughness of a dielectric film are suppressed, and insulation of a variable capacitance capacitor is improved. A lower electrode layer (2), a dielectric layer (3) and an upper electrode layer (4) are successively stacked on a supporting substrate (1). The variable capacitance capacitor is provided with a first region (a-b) covered with the upper electrode layer (4), and a second region (b-c) other than the first region. The thickness of the second region of the dielectric layer (3) has a step portion where the thickness of the second region of the dielectric layer (3) is smaller than the thickness of the first region, and the surface roughness of the second region is smaller than that of the first region.</p> |
