| 摘要 |
A robot for transferring a substrate is provided to realize a very simple structure and to reduce the manufacturing cost by performing forward, backward, upward, and downward movements of a robot arm using the revolution of a rotational cam. A rotational cam(110) has a cylindrical shape arranged in a horizontal direction. An oval-shaped first guidance orbit having a slope angle for a central axis is formed around a surface of the circumference of the rotational cam. A circular or an oval-shaped second guidance orbit being partially eccentric for the central axis is formed around a side of the rotational cam. A driving unit(120) is connected to the rotational cam to rotate it. A first movement member(130) is arranged to perform a horizontal back-and-forth movement along the first guidance orbit by the revolution of the rotational cam. A second movement member(140) is arranged to perform a vertical back-and-forth movement along the second guidance orbit by the revolution of the rotational cam. A third movement member(150) is coupled between the first movement member and the second movement member. The third movement member performs a horizontal movement on the second movement member by the horizontal movement of the first movement member. The third movement member performs a vertical movement on the first movement member by the vertical motion of the second movement member. A robot arm(160) is mounted on the third movement member to transfer a substrate.
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