| 摘要 |
PROBLEM TO BE SOLVED: To certainly prevent the overlap inspection of the same substrate. SOLUTION: This substrate inspection device 1 includes an inspection unit 50 for inspecting the substrate P, a substrate supply unit 24 capable of manually supplying the substrate P to the inspection unit 50 and a liquid crystal monitor 4 for displaying predetermined data including the inspection result of the substrate P and provided with a camera 52 for recognizing the discrimination data applied to the substrate P and a control unit 60 which confirms the inspection history of the substrate P from the discrimination data acquired through the camera 52 and displays that the substrate P is already inspected on the liquid crystal monitor 4 in the case where the substrate P is confirmed to be inspected to prevent the execution of the inspection operation of the substrate P due to the inspection unit 50. COPYRIGHT: (C)2008,JPO&INPIT
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