| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a piezoelectric acceleration sensor which has a simple structure, is small and has high performance, and can detect three-axis acceleration. <P>SOLUTION: The piezoelectric acceleration sensor 1 is formed by using piezoelectric ceramic material, and includes an external frame member 9 in a closed shape, a fixed-fixed beam member 3 connecting two points of the external frame 9, and a first and a second cantilever beam 4 and 5 connected to the fixed-fixed beam 3 perpendicularly. Moreover, in addition to the above constitution the fixed-fixed beam 3 and the first and second beams 4 and 5 are respectively polarized in directions perpendicular to each other. Furthermore, acceleration detection electrodes are formed on the fixed-fixed beam 3 and the first and second beams 4 and 5. <P>COPYRIGHT: (C)2008,JPO&INPIT |
