| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus capable of quickly correcting a frame due to a secular change and an installment condition. <P>SOLUTION: The exposure apparatus corrects by comparing a light receiving position of light receiving parts PDx and PDy with a stored light receiving position and discriminating that the frame 3 is deformed if they are different. The correction moves a second tapered part 2b of any one of height adjustment devices along a surface plate G, and raises or lowers a first tapered part 2a due to wedge action. <P>COPYRIGHT: (C)2008,JPO&INPIT |
