| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump module having improved fluid discharging accuracy while sufficiently securing the reproductivity of a discharge amount in a process of manufacturing various kinds of flat plate displays. SOLUTION: The pump module comprises a cylinder having an internal space and having a suction port and a discharge port formed in the side face, a piston for rotating and reciprocating in the state of being inserted into the cylinder, having an opening groove for selectively opening the suction port or the discharge port depending on the rotating position, a rotation actuator for giving rotation to the piston, a linear actuator for giving reciprocation to the piston, and a control part for controlling the rotation actuator and the linear actuator so that a set amount of fluid can be discharged at least twice through the discharge port after sucking fluid once through the suction port. COPYRIGHT: (C)2008,JPO&INPIT
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