| 摘要 |
PROBLEM TO BE SOLVED: To easily forme a regulating member for regulating the shake of the weight portion of an acceleration sensor, and to facilitate the manufacture of an integrated acceleration sensor and its miniaturization. SOLUTION: This integrated acceleration sensor has an acceleration sensor 2, an IC chip 3, and a housing 4. The acceleration sensor 2 has a weight portion 2a, a beam portion 2b, and a support 2c. The IC chip 3 has a processing circuit formation surface 31, and the formation surface 31 has stoppers 5 being a regulating member for regulating the shaking range of the weight portion 2a of the acceleration sensor 2. The acceleration sensor 2 and the IC chip 3 are arranged so that the beam-supporting-side surface 2e of the weight portion 2a of the acceleration sensor 2 is separated from the formation surface 31 of the IC chip 3 by a predetermined interval, the IC chip 3 and the housing 4 are electrically connected with a conductive means 6 and are fixed, and the IC chip 3 constitutes a lid for the housing 4. COPYRIGHT: (C)2008,JPO&INPIT
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