发明名称 |
Dielectric barrier diescharge excimer light source |
摘要 |
An anode electrode 10 is composed of a straight elongated cylindrical body, and the outer periphery of the cylindrical body is covered with a dielectric body 12 . Further, a cathode portion 20 has a straight semicylindrical shape. A cathode 25 surrounds the anode, and the anode and cathode are disposed parallel to each other in the longitudinal direction. Further, the cathode comprises a cathode wire group 16 . Both ends of the cathode wire group are fixed to both ends 20 D in the longitudinal direction of the semicylindrical body constituting the cathode portion, so that a plurality of wires become parallel to each other. A reflective surface for reflecting irradiation in a vacuum ultraviolet region is formed on the surface 20 S of the cathode portion at the side facing the anode.
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申请公布号 |
US2008054773(A1) |
申请公布日期 |
2008.03.06 |
申请号 |
US20070976458 |
申请日期 |
2007.10.24 |
申请人 |
SEN ENGINEERING CO., LTD.;HIGH CURRENT ELECTRONICS INSTITUTE |
发明人 |
LOMAEV MIKHAIL I.;LISENKO ANDREY A.;SKAKUN VICTOR S.;SHITZ DMITRII V.;TARASENKO VICTOR F.;MATSUMOTO YOSHIIE |
分类号 |
H01J1/02;H01J65/00;H01J65/04;H01S3/038;H01S3/0971;H01S3/225 |
主分类号 |
H01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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