发明名称 |
Heat analysis device i.e. differential scanning calorimeter, has flow controller setting flow rate of gas guided to furnace`s inner area, where operation terms are set in section to differ terms in higher and lower temperature sides |
摘要 |
<p>The device (1) has a processor section (7) evaluating cooling gas flow rate corresponding to temperature of a temperature program. A mass flow controller (8) is connected with a temperature program adjuster (4) over the section and sets the flow rate of gas that is guided to an inner area of a heat furnace (2) according to signal of the rate. Operation terms computing the flow rate are set in the section such that the terms differ in higher and lower temperature sides as a preset marginal temperature, where the computed rate is set to a level at which the furnace is undamaged.</p> |
申请公布号 |
DE102007034171(A1) |
申请公布日期 |
2008.03.06 |
申请号 |
DE20071034171 |
申请日期 |
2007.07.23 |
申请人 |
SII NANO TECHNOLOGY INC. |
发明人 |
NAGASAWA, KANJI;NAKATANI, RINTARO |
分类号 |
G01N25/20 |
主分类号 |
G01N25/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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