METHOD AND A DEVICE FOR MEASURING A MOTION OF A HOLDER FOR A TRANSMISSION ELECTRON MICROSCOPE IMPROVING RESOLUTION OF THE TEM

摘要

A method and a device for measuring a motion of a holder for a transmission electron microscope are provided to compensate for a motion error of the holder by using a slant or rotation angle of the holder. An SEM(100) directly observes a mounting portion of a slice. A cover(200) is fixed on a vacuum chamber of the SEM(Scanning Electron Microscope). A 2-axis stage(300) is mounted on the cover and vertically and horizontally moves a TEM holder. A holder cartridge(400) is mounted on the 2-axis storage. A holder of the TEM is inserted into the holder cartridge. A rotating stage(500) is mounted on the 2-axis stage and rotates the TEM holder. A back/forth moving unit(600) is mounted on the rotation stage and moves the TEM(Transmission Electron Microscope) holder, which is mounted on the rotating stage, in vertical and horizontal directions.