发明名称 MASS SPECTROMETER
摘要 The invention relates to a mass spectrometer arrangement comprising a cathode arrangement (6) for emitting electrons (21), a reaction zone (3) connected to an entrance opening (14) for the supply of neutral particles (20), this opening being operatively connected to the cathode arrangement (6) for ionizing neutral particles (20), an ion extraction arrangement (4) which is arranged such that it communicates with the effective range of the reaction zone (3), means for guiding ions (22) to a detection system (12) and means for evacuating the mass spectrometer arrangement. The cathode arrangement (6) comprises a field emission cathode having an emitter area (7), wherein, at a small distance from said emitter area (7), an extraction grid (9) for extracting electrons is arranged, which grid substantially covers the emitter area (7). The emitter area (7) at least partially surrounds a cavity (13) such that a tubular structure is formed.
申请公布号 WO2008025174(A2) 申请公布日期 2008.03.06
申请号 WO2007CH00371 申请日期 2007.07.27
申请人 INFICON GMBH;WUEEST, MARTIN;KNAPP, WOLFRAM 发明人 WUEEST, MARTIN;KNAPP, WOLFRAM
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