ATMOSPHERIC TRANSFER CHAMBER, PROCESSED OBJECT TRANSFER METHOD, PROGRAM FOR PERFORMING THE TRANSFER METHOD, AND STORAGE MEDIUM STORING THE PROGRAM,申请号KR20060024148-传众专利搜索

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发明名称	ATMOSPHERIC TRANSFER CHAMBER, PROCESSED OBJECT TRANSFER METHOD, PROGRAM FOR PERFORMING THE TRANSFER METHOD, AND STORAGE MEDIUM STORING THE PROGRAM
摘要
申请公布号	KR100810796(B1)	申请公布日期	2008.03.06
申请号	KR20060024148	申请日期	2006.03.16
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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