摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conductive paste in which when a plurality of via holes of different diameters are formed in an aluminum nitride casting body, the conductive paste can be filled into the whole via holes more surely by one-time operation, and when simultaneously calcining this conductive past together with the aluminum nitride formed body, a dent in the upper face of the calcined conductive paste becomes small. <P>SOLUTION: This is the conductive paste filled into the via holes formed in the aluminum nitride formed body, and this is composed by mixing high melting point metal powders, aluminum nitride powders, and a binder, in which the average particle diameter of the high melting point metal powder is 2 μm or less, and in which against 22 to 28 wt.% of the aluminum nitride powder, the high melting point powder is blended by 78 to 72 wt.%. <P>COPYRIGHT: (C)2008,JPO&INPIT |