发明名称 METHOD OF MANUFACTURING DISPLAY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a display device which can be manufactured while improving utilization factor of materials and simplifying manufacturing processes, and a manufacturing technique thereof. <P>SOLUTION: This method includes steps of forming a light absorbing layer, forming an insulating layer on the light absorbing layer, selectively irradiating the light absorbing layer and the insulating layer with a laser beam and removing an irradiation region of the light absorbing layer and an irradiation region of the insulating layer to form an opening on the light absorbing layer and the insulating layer, and forming a conductive film on the opening so that it contacts the light absorbing layer. The conductive film is formed on the opening so as to contact the exposed light absorbing layer, and thus, the light absorbing layer can electrically connected to the conductive film via the insulating layer. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008053699(A) 申请公布日期 2008.03.06
申请号 JP20070192868 申请日期 2007.07.25
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;TANAKA KOICHIRO;SHOJI HIRONOBU;ARAI YASUYUKI
分类号 H01L21/768;G02F1/13;G02F1/1362;G09F9/00;G09F9/30;H01L21/28;H01L21/302;H01L21/336;H01L29/786;H01L51/50;H05B33/10 主分类号 H01L21/768
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